Title:
FLAT-PANEL TYPE IMAGE SENSOR
Document Type and Number:
Japanese Patent JP2002289821
Kind Code:
A
Abstract:
To provide a flat-panel type image sensor having high reliability in strength.
The thickness of an insulating resin 6 is uniform in a region, in which a semiconductor film 3 is formed on an active matrix substrate 2, shown by a region Y1, and a region, in which a semiconductor film 3 is not formed on an active matrix substrate 2, shown by a region X1. Consequently, stresses generated inside the insulating resin 6 in a flat-panel type image sensor 1 can be reduced, bending of the active matrix substrate 2 can be prevented, and the resistance of the flat-panel type image sensor 1 with respect to impacts can be improved.
Inventors:
IZUMI YOSHIHIRO
Application Number:
JP2001306959A
Publication Date:
October 04, 2002
Filing Date:
October 02, 2001
Export Citation:
Assignee:
SHARP KK
International Classes:
H01L27/14; G01T1/24; H01L27/146; H01L31/02; (IPC1-7): H01L27/14
Attorney, Agent or Firm:
Kenzo Hara
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