Title:
フリップチップ実装装置及び実装方法
Document Type and Number:
Japanese Patent JP4501093
Kind Code:
B2
Inventors:
Yoshinao Kitano
Application Number:
JP2000213096A
Publication Date:
July 14, 2010
Filing Date:
July 13, 2000
Export Citation:
Assignee:
NEC
International Classes:
H01L21/60; H01L21/52
Domestic Patent References:
| JP8203966A | ||||
| JP7221138A | ||||
| JP11288980A | ||||
| JP2000133684A | ||||
| JP5074838A | ||||
| JP10340931A |
Attorney, Agent or Firm:
Keiji Miyamoto