FLOW SENSOR ELEMENT AND FLOW SENSOR

Title:

FLOW SENSOR ELEMENT AND FLOW SENSOR

Document Type and Number:

Japanese Patent JP2004144560

Kind Code:

A

Abstract:

To provide an easily-manufacturable flow sensor element and a flow sensor having a simple structure, which detects a gas flow change with high sensitivity.

This element is equipped with: a gas flow passage 14 formed on a semiconductor substrate 11 so that its sectional area is reduced to the utmost; and a heater 12 formed as a heat sensitive element along the gas flow passage 14.

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Inventors:

YAMAGISHI YUTAKA
KAMISAKA HIROJI
OKAMOTO KAZUTAKA
IDO TAKUYA
NAKADA YOSHIAKI

Application Number:

JP2002308498A

Publication Date:

May 20, 2004

Filing Date:

October 23, 2002

Export Citation:

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Assignee:

HORIBA LTD

International Classes:

G01F1/688; (IPC1-7): G01F1/688

Attorney, Agent or Firm:

Hideo Fujimoto

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