FLOW-VELOCITY SENSOR AND FLOW-VELOCITY MEASURING APPARATUS

Title:

FLOW-VELOCITY SENSOR AND FLOW-VELOCITY MEASURING APPARATUS

Document Type and Number:

Japanese Patent JPH07174600

Kind Code:

A

Abstract:

PURPOSE: To measure a flow velocity with good linearity and precisely in a large flow-velocity range.

CONSTITUTION: Ditches 5 are formed on the surface of a substrate 7, a bridge 6 by an electric insulating film 3 is constructed on the ditches 5, a heating element 1 is installed on the downstream side in a flow passage direction and a heating-element temperature measuring body 2 is installed to be adjacent on the upstream side in the bridge 6. The heating element 1 is driven in such a way that a temperature difference between a fluid-temperature measuring body 4 arranged in a part of the electric insulating film 3 and the heating- element temperature measuring body 2 is kept definite, and a flow-velocity signal whose sensitivity is excellent in a small flow-velocity region from a potential difference between both ends of the heating element 1 and whose linearity is good in a large flow-velocity region, is obtained.

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