Title:
ナノスケール製造技術における流体の分配およびドロップ・オン・デマンド分配技術
Document Type and Number:
Japanese Patent JP4792028
Kind Code:
B2
Abstract:
The present invention is directed to a method for dispensing a total volume of liquid on a substrate, the method including, inter alia, disposing a plurality of spaced-apart droplets on a region of the substrate, each having an unit volume associated therewith, with an aggregate volume of the droplets in the region being a function of a volume of a pattern to be formed thereat.
Inventors:
Rad, Pankazi Bee
McMckin, Ian Em
Torsket, Van N
Shoemaker, Norman E
Sligny Vassan, Citrgata Vui
Vouse, Duane
Shoemaker, Philip D.
Fletcher, edward bee
McMckin, Ian Em
Torsket, Van N
Shoemaker, Norman E
Sligny Vassan, Citrgata Vui
Vouse, Duane
Shoemaker, Philip D.
Fletcher, edward bee
Application Number:
JP2007515597A
Publication Date:
October 12, 2011
Filing Date:
June 02, 2005
Export Citation:
Assignee:
Molecular Imprints Incorporated
International Classes:
H01L21/027; B41J2/01; B41J3/28; B41J3/407; G03F7/00; H01L51/40
Domestic Patent References:
| JP2004504714A | ||||
| JP2003527248A | ||||
| JP2003517727A |
Foreign References:
| WO2004016406A1 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa