To quickly and accurately correct an overlap when a spectrum of an analyzed element is overlapped with a spectrum of another element to disturb measurement.
A storage means 16 stores a correlation of intensity of the disturbing spectrum of another element with intensity of spectrum for correction different from the disturbing spectrum in the spectrum of another element. Intensity of the disturbance spectrum is calculated based on measured intensity of the spectrum for the correction and the correlation, the intensity of the disturbance spectrum calculated herein is subtracted from the measured intensity of an uncorrected spectrum containing the analyzed element spectrum, and an overlap correcting means 17 finds the intensity of the analyzed element spectrum. A selection means 15 selects either of primary X-ray sources 2A, 2B, 2C different each other, corresponding to the measurement of the uncorrected spectrum or the measurement of the spectrum for the correction.
YAMADA TAKASHI
Masashi Noda
Kenro Tsutsumi