FOCUSED CHARGED-PARTICLE BEAM DEVICE AND ITS CONTROL METHOD

Japanese Patent JP3683130

B2

PROBLEM TO BE SOLVED: To obtain a fine picture even with high magnification and to obtain accurate output data (such as an SEM image).
SOLUTION: In scanning the surface of a sample by a control means 3 to obtain a plurality of pieces of frame information for forming an SEM(scanning electron microscope device) image, if overlap portions are produced between neighboring irradiation spots, the plurality of pieces of frame information are made up of a first piece of frame information obtained with actual magnification and a second piece of frame information obtained with lower magnification than the actual magnification. If no overlap portions are produced, the frame information is made up of the first piece of frame information, and only the first piece of frame information is stored in a picture memory 4. An SEM picture is formed only of the first piece of frame information and displayed on a display 5.

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Koichi Nagai

JP19805999A

August 17, 2005

July 12, 1999

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富士通株式会社

H01J37/22; G02B21/00; H01J37/147; (IPC1-7): H01J37/147; G02B21/00; H01J37/22

JP5074399A
JP6124681A
JP8160111A
JP10233185A

Takayoshi Kokubun
Sadaichi Igita

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