FORMATION OF AMORPHOUS THIN FILM OF ORGANIC OPTICAL FUNCTION MATERIAL

Title:

FORMATION OF AMORPHOUS THIN FILM OF ORGANIC OPTICAL FUNCTION MATERIAL

Document Type and Number:

Japanese Patent JPH11335817

Kind Code:

A

Abstract:

To provide a method for forming an amorphous thin film substantially maintaining the chemical structure of an org. optical function material on a substrate without using a large-scale apparatus.

This amorphous thin film forming method for the org. optical function material is a method of forming the thin film by irradiating a target consisting of a low molecular org. compd. having an optical function with a UV light laser 3 to vaporize the low molecular org. compd. and depositing the vaporized low molecular org. compd. on a substrate 11, in which the irradiation intensity E (mJ/cm2) of the UV laser satisfies the conditions: C×1.5≤E≤C×4 (where, C: the irradiation intensity E (mJ/cm2) of the UV light laser at which the vaporized low molecular org. compd. substantially begins to be deposited.

Inventors:

OYA TOSHIHIKO
YANO TETSUO
YONEDA MICHIFUMI
KATSUMURA MUNEHIDE
KAJITANI TAKAHIRO
TANAKA OSAMU
TANGE YOSHIHIRO
MATSUDA HIDEAKI

Application Number:

JP13835998A

Publication Date:

December 07, 1999

Filing Date:

May 20, 1998

Export Citation:

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Assignee:

OKURA INDUSTRIAL CO LTD
AGENCY IND SCIENCE TECHN

International Classes:

C23C14/12; C23C14/28; (IPC1-7): C23C14/12; C23C14/28

Attorney, Agent or Firm:

Director, Shikoku Institute of Industrial Technology, AIST

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