Title:
FORMATION OF LIGHT GUIDE
Document Type and Number:
Japanese Patent JPH02146505
Kind Code:
A
Abstract:
PURPOSE:To form the light guides which are suitable for practicable use even if the width thereof is narrowed by spacing the forming position of the 1st pattern and the forming position of the 2nd pattern. CONSTITUTION:The 1st impurity diffused region 16 is formed and the 2nd pattern 18 contg. the 2nd impurity for forming a refractive index decreasing region is formed on a substrate surface 10a. The forming region 24 of the 2nd pattern 18 is parted from the 1st pattern forming region 12 and is set on the outside of this region 12 so that the forming position of the 1st pattern 18 and the forming position of the 1st pattern 12 are parted. The diffusion treatment to the 2nd pattern is then executed to form the 2nd impurity diffused region 26. The 2nd diffused region 26 is formed by parting the forming positions of the 2nd pattern 18 and the 1st pattern 12 in such a manner, by which the 1st diffused region 16 having the high refractive index is obtd. while the width of the 1st diffused region 16 of the high refractive index substantially forming the light guide is narrowed.
Inventors:
OKAYAMA HIDEAKI
NAGAI KIYOSHI
NAGAI KIYOSHI
Application Number:
JP30198688A
Publication Date:
June 05, 1990
Filing Date:
November 29, 1988
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G02B6/13; G02B6/12; (IPC1-7): G02B6/12
Attorney, Agent or Firm:
Takashi Ogaki