Title:
FORMATION OF MATERIAL COMPOSED MAINLY OF CARBON
Document Type and Number:
Japanese Patent JP2673766
Kind Code:
B2
Abstract:
PURPOSE: To form a carbon coated film having energy band similar to diamond by impressing electromagnetic energy to a gaseous hydrocarboneceous material and hydrogen and dehydrogenating to covalently bond carbon with each other.
CONSTITUTION: A gaseous hydrocarboneceous materials such as acetylene or methane based hydrocarbon, tetramethyl silane or tetraethyl silane is prepared. Carbons are covalently bonded with each other by impressing electromagnetic energy to the gaseous hydrocarboneceous material and hydrogen and dehydrogenating. As a result, a carbon excess silicon carbide containing ≤30mol% carbon or 0.01-20mol% hydrogen is obtained.
Inventors:
Sanpei Yamazaki
Application Number:
JP24866092A
Publication Date:
November 05, 1997
Filing Date:
August 25, 1992
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
B41J2/335; C01B31/02; C04B41/50; C23C16/26; C23C16/32; (IPC1-7): C01B31/02; B41J2/335; C23C16/26; C23C16/32; C30B29/04
Domestic Patent References:
| JP5578524A |