Title:
FORMATION OF THIN ALUMINUM FILM AND BOAT FOR RESISTANCE HEATING
Document Type and Number:
Japanese Patent JPH0525633
Kind Code:
A
Abstract:
PURPOSE: To continuously form thin Al films by vacuum deposition on acrylic resin substrates such as laser disks.
CONSTITUTION: An Al wire 51 is gradually fed into the melting chamber of a boat 33 with a temp. gradient by which Al is liable to flow from the melting chamber into the main evaporation chamber. Acrylic resin substrates 61 are successively introduced from 1st an 2nd replacing chambers 13, 15 into a vacuum deposition chamber 11 while maintaining the vacuum and Al is continuously vacuum-deposited on the substrates 61.
Inventors:
ODAGIRI AKIRA
DAIKUHARA SHIGEKI
AOYAMA TAKAAKI
DAIKUHARA SHIGEKI
AOYAMA TAKAAKI
Application Number:
JP20755191A
Publication Date:
February 02, 1993
Filing Date:
July 23, 1991
Export Citation:
Assignee:
SHINKURON KK
International Classes:
C23C14/56; (IPC1-7): C23C14/56
Attorney, Agent or Firm:
Fumio Usmura
Next Patent: VACUUM FILM FORMING DEVICE