Title:
FORMING METHOD OF CONDUCTIVE FILM PATTERN, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2005079010
Kind Code:
A
Abstract:
To provide a method of forming a conductive film pattern by well modifying a conductive thin film on a base plate without subject to quality of materials of the base plate.
A laser beam is irradiated on the base plate 1 having a conductive layer 3 including a conductive material and a photothermal conversion layer 2 including a photothermal conversion material converting light energy into thermal energy, and at least a part of the conductive layer 3 is baked with the use of the photothermal conversion material.
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Inventors:
TOYODA NAOYUKI
Application Number:
JP2003310071A
Publication Date:
March 24, 2005
Filing Date:
September 02, 2003
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G03F7/00; C23C18/14; H01B13/00; H01L21/28; H01L21/285; H01L21/288; H01L21/302; H01L21/3205; H01L21/44; H01L21/461; H01L21/768; H05B33/10; H05B33/12; H05B33/26; H05K3/02; H05K3/04; H05K3/20; G02F1/1343; H05K1/09; (IPC1-7): H01B13/00; H01L21/288; H01L21/3205
Domestic Patent References:
| JP2004143571A | 2004-05-20 | |||
| JP2004039846A | 2004-02-05 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Fujitsuna Hideyoshi
Osamu Suzawa
Fujitsuna Hideyoshi
Osamu Suzawa