Title:
FRAME CLAMP DEVICE
Document Type and Number:
Japanese Patent JP2015079828
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To detect whether a frame has been clamped or not without being affected by spray of a cutting fluid and contamination, which occur during cutting with use of the cutting fluid, in a frame clamp device for clamping the frame supporting a workpiece.SOLUTION: A frame clamp device 6 for fixing an annular frame which is disposed on an outer periphery of a chuck table to support a workpiece, includes: a retaining member 63 to be located in a clamp position or a release position; and detection means 64. When the retaining member 63 is located in the clamp position, a pressure value becomes equal to or lower than a prescribed value because a vacuum hole 640a of a vacuum pad 640 is closed by contact with the retaining member 63 to generate a negative pressure, thereby the detection means 64 detects that the retaining member 63 is located in the clamp position. Since a cutting fluid and contamination are sucked from the vacuum hole 640a, the detection means 64 can be prevented from becoming inoperative due to deposition of them.
Inventors:
OGAWARA SATOSHI
NAKANISHI YUJI
NAKANISHI YUJI
Application Number:
JP2013215465A
Publication Date:
April 23, 2015
Filing Date:
October 16, 2013
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B24B27/06; B24B49/08; H01L21/683
Domestic Patent References:
| JP2012009467A | 2012-01-12 | |||
| JP2011042003A | 2011-03-03 | |||
| JPH0412936A | 1992-01-17 | |||
| JP2009010150A | 2009-01-15 | |||
| JP2011014568A | 2011-01-20 |
Attorney, Agent or Firm:
Kyoko Kawamura
Isao Sasaki
Ken Kubo
Isao Sasaki
Ken Kubo