To provide a functional element capable of securing large facing areas between a movable part and a driving part without employing a complicated structure such as an interdigital structure.
The functional element 1 includes the movable part 5, the driving part 6 for activating the movable part 5 by static electricity, and a support 7 for supporting the driving part 6. The movable part 5, the driving part 6 and the support 7 are structured using a substrate 2 equipped with an insulation layer 13 provided between a first conductive layer 11 and a second conductive layer 12. The driving part 6 is formed of the first conductive layer 11, the second conductive layer 12 and the insulation layer 13, and in addition has a contact part 17 for making the conductive layers conduct with each other. The movable part 5 is formed of the first conductive layer 11, the second conductive layer 12 and the insulation layer 13 inside the driving part 6 by being electrically separated from it. The support 7 is formed of the first conductive layer 11, the second conductive layer 12 and the insulation layer 13 outside the driving part 6 by being electrically separated from it.
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