GALVANOMIRROR AND OPTICAL DISK DEVICE USING THE SAME

Title:

GALVANOMIRROR AND OPTICAL DISK DEVICE USING THE SAME

Document Type and Number:

Japanese Patent JPH09146035

Kind Code:

A

Abstract:

To make a galvanomirror lightweight and small-sized in constitution possible to perform high-speed seeking.

The galvenomirror 9 is constituted by laminating two plates; a first plate 21 and a second plate 22. The first plate 21 consists of a stationary part 24, an oscillating part 25 and two elastic parts 26a, 26b which are integrally molded by anisotropic etching of a semiconductor mainly composed of silicon. The second plate 22 is formed out of an electrically insulating material, for example, glass plate and is joined to the stationary part 24 of the first plate 21 by means, such as electrostatic joining. Further, as the sectional shapes of the elastic parts 26a, 26b are formed longer in the direction orthogonal to the reflection mirror surface formed in the part 25 with respect to the length in the direction parallel with the reflection surface.

Inventors:

KASAHARA AKIHIRO
UCHIMARU KIYOTAKA
SEKIMURA MASAYUKI

Application Number:

JP30578395A

Publication Date:

June 06, 1997

Filing Date:

November 24, 1995

Export Citation:

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Assignee:

TOSHIBA CORP

International Classes:

G02B26/10; G11B7/09; (IPC1-7): G02B26/10; G11B7/09

Attorney, Agent or Firm:

Togawa Hideaki

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