Title:
隙間ゲージ
Document Type and Number:
Japanese Patent JP7497154
Kind Code:
B2
Abstract:
To provide a feeler gauge with which a user can readily grasp a wear state.SOLUTION: A feeler gauge 50 includes: first regions 51-53 including bottom surfaces 51b-53b formed into a desired thickness and placed on a chuck table 60 and top surfaces 51a-53a coming into contact with a grindstone 37; and recesses 54-56 formed at the top surfaces 51a-53a of the first regions 51-53 to indicate a use-life.SELECTED DRAWING: Figure 3
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Inventors:
Yuya Tanaka
Application Number:
JP2019230320A
Publication Date:
June 10, 2024
Filing Date:
December 20, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B47/22; B24B7/04; B24B47/26; G01B3/30; H01L21/304
Domestic Patent References:
| JP2019115975A | ||||
| JP63138201A | ||||
| JP2008087104A | ||||
| JP2018159579A | ||||
| JP53049191U |
Foreign References:
| US6106661 |
Attorney, Agent or Firm:
Atago Patent Attorneys Office
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
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