Title:
隙間センサおよび隙間測定方法
Document Type and Number:
Japanese Patent JP6718622
Kind Code:
B2
Abstract:
A probe (2) is a three-layer substrate having two faces on which paired electrodes (E1, E2) are formed at corresponding positions and guard patterns (Ge) are formed around the electrodes. The guard patterns and all electrodes are driven by a common probe signal (Vp) to an equal potential, thereby commonly guarding the electrodes. Based on a clamp current of each electrode, a capacitance is found to obtain gap data.
Inventors:
Yoshioka Kyooka
Masato Abe
Masato Abe
Application Number:
JP2017104083A
Publication Date:
July 08, 2020
Filing Date:
May 26, 2017
Export Citation:
Assignee:
Kyooka Co., Ltd.
International Classes:
G01B7/14
Domestic Patent References:
| JP200969035A | ||||
| JP2007225443A | ||||
| JP200926767A |
Foreign References:
| WO2011080308A1 | ||||
| US6828806 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Toshio Takamatsu
Toshio Takamatsu