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Title:
GAS DISSOLVED WASHING WATER SUPPLY APPARATUS
Document Type and Number:
Japanese Patent JP2001314740
Kind Code:
A
Abstract:

To provide a gas dissolved washing water supply apparatus with enables successively supplying plural kinds of gas dissolved washing water by using a simple apparatus of one series and corresponding to a one-bath type washer or a leaf type washer.

This gas dissolving washing water supply apparatus is provided with a gas dissolving part which is composed of one of plural gas dissolvers 1 of mixing type which directly mixes gas and pure water and dissolves the gas, a pure water supply piping 2 which supplies pure water to the gas dissolving part, a gas supply means which supplies plural kinds of gas to the gas dissolving part, a supplying pipe 6 which sends out the gas dissolved washing water into the gas dissolving part and a gas-liquid separator 7 which is disposed on the supplying pipe.


Inventors:
MORITA HIROSHI
Application Number:
JP2000140481A
Publication Date:
November 13, 2001
Filing Date:
May 12, 2000
Export Citation:
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Assignee:
KURITA WATER IND LTD
International Classes:
B08B3/08; B01F1/00; B01F3/04; H01L21/304; (IPC1-7): B01F1/00; B01F3/04; B08B3/08; H01L21/304
Domestic Patent References:
JPS63302926A1988-12-09
JPH0541369A1993-02-19
JPH11188374A1999-07-13
JPH1171600A1999-03-16
JPH0490891A1992-03-24
JPH10252700A1998-09-22
JPH10244269A1998-09-14
JPH10155858A1998-06-16
Attorney, Agent or Firm:
Uchiyama Mitsuru



 
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