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Title:
GAS FLOW PATH MEMBER IN GAS TREATMENT APPARATUS, AND GAS DETECTOR
Document Type and Number:
Japanese Patent JP2014074647
Kind Code:
A
Abstract:

To provide: a gas flow path member capable of surely and easily connecting a gas device to a gas inflow part or a gas outflow part; and a gas detector capable of easily forming a predetermined gas piping structure and obtaining high maintenance performance.

This gas flow path member comprises a gas flow path for connecting a plurality of gas devices to each other used in a gas treatment apparatus. The gas flow path member is formed with a plurality of flow path chambers mutually partitioned, each of which is formed with a gas inflow part and a gas outflow part opening on a front surface or on a rear surface, between a front surface plate and a rear surface plate mutually connected and fixed. In two mutually adjacent flow path chambers, the gas devices are connected to a gas inflow part of one flow path chamber and a gas outflow part of the other flow path chamber. A gas sensor and a pump are connected to each other by the above gas flow path member.


Inventors:
YAMADA KENTARO
Application Number:
JP2012222129A
Publication Date:
April 24, 2014
Filing Date:
October 04, 2012
Export Citation:
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Assignee:
RIKEN KEIKI KK
International Classes:
G01N27/00; G01N1/00; G01N27/16; F16L41/00
Domestic Patent References:
JP2003215001A2003-07-30
JP2001147722A2001-05-29
JP2005134331A2005-05-26
JP2012078218A2012-04-19
JP2003215001A2003-07-30
JP2001147722A2001-05-29
JP2005134331A2005-05-26
Attorney, Agent or Firm:
Masahiko Oi