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Title:
GLASS BOARD FOR DUMMY WAFER
Document Type and Number:
Japanese Patent JPH04318955
Kind Code:
A
Abstract:

PURPOSE: To have a light-screening film part excellent in chemical durability and mechanical durability by providing a light-screening film consisting of ceramics on a part of the glass substrate surface.

CONSTITUTION: A light-screening film 2 consisting of a metal, a metal oxide or ceramics is provided on a part of the surface of a glass substrate 1, further, a transparent film of a zirconium silicide oxide is provided at least to cover the light-screening film 2. In order to provide the light-screening film 2 on a part of the surface of the glass substrate 1, a film can be made on a desired part by a sputtering method, also a method, where the light-screening film 2 excepting the desired part is removed by etching or the like can be adopted after making the light-screening film 2 on the whole of the surface. Thereby, it can act as the light-screening film 2 sufficiently efficient in an anti-abrasion property and chemical durability.


Inventors:
ISHIKAWA HIROYUKI
HASHIZUME KENICHI
MAKINO ICHIRO
Application Number:
JP11256391A
Publication Date:
November 10, 1992
Filing Date:
April 17, 1991
Export Citation:
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Assignee:
ASAHI GLASS CO LTD
International Classes:
G03F1/84; H01L21/02; H01L21/027; H01L21/66; (IPC1-7): G03F1/08; H01L21/027; H01L21/66
Attorney, Agent or Firm:
Kenji Izumina



 
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