PURPOSE: To provide a glass having a tin-doped indium oxide film having high resistance and excellent uniformity by adding a third component in the formation of the tin-doped indium oxide film.
CONSTITUTION: This glass having a tin-doped indium oxide film is produced by adding a third component in the film-forming stage. The tin-doped indium oxide film has a sheet resistance of 200-300Ω/square and a linearity value of ≤±F2%. The third component is at least one kind of element selected from the groups 2 to 16 of the periodic table or its compound and the amount of the element to be added to the film is 0.05-20atom%. A tin-doped indium oxide film having desired physical properties can be produced by heat-treating the film at ≥200°C in oxygen atmosphere.
ISHII TAKESHI
YAMADA SHIGEO
TAKIZAWA KAZUMASA
