Title:
窒化ガリウム層を備える黒鉛材及びその製造方法
Document Type and Number:
Japanese Patent JP5896701
Kind Code:
B2
Inventors:
Hiroshi Okano
Gojiki
Masaya Yano
Yuki tetsuya
Toshihiro Hosokawa
Masayuki Ito
Gojiki
Masaya Yano
Yuki tetsuya
Toshihiro Hosokawa
Masayuki Ito
Application Number:
JP2011259466A
Publication Date:
March 30, 2016
Filing Date:
November 28, 2011
Export Citation:
Assignee:
Toyo Tanso Co., Ltd.
National Institute of Technology
National Institute of Technology
International Classes:
C30B29/38; C23C16/34; C30B25/18; H01L21/205
Domestic Patent References:
| JP2009200207A | ||||
| JP2011057474A | ||||
| JP2011110694A | ||||
| JP62143897A | ||||
| JP11100207A |
Foreign References:
| WO2009113472A1 |
Attorney, Agent or Firm:
Patent business corporation Miya saki, table of contents patent office