Title:
研削装置
Document Type and Number:
Japanese Patent JP7502941
Kind Code:
B2
Abstract:
To provide a grinding device which can measure a precise height of an upper surface of a workpiece even if hot grinding water spills on a measuring device.SOLUTION: An upper surface height measuring device 6 includes: a shaft 61 which in which a probe 60 is located at a lower end and which may move vertically; a shaft support guide 69; a shaft vertical driving part 64; a shaft 61; a guide 69; a scale 63; and a case 65 wich houses the vertical driving part 64 and exposes the probe 60 to the outside; and a prevention mechanism 2. The prevention mechanism 2 includes: an upper plate 20 which is parallel to an upper surface of the case 65 and disposed so that a gap 200 is provided above the upper surface and an upper plate outer peripheral edge 201 is located at the slightly inner side from an upper surface outer peripheral edge 6581; and an upper surface water supply part 22 which supplies water to the gap 200 between a lower surface of the upper plate 20 and the upper surface of the case 65 to form a water layer on the upper surface. The supplied water forms the water layer on the upper surface of the case 65 and overflows from the upper plate outer peripheral edge 201 to fall along a side surface of the case 65 and form the water layer which covers the side surface.SELECTED DRAWING: Figure 2
Inventors:
Atsushi Nakatsuka
Application Number:
JP2020148806A
Publication Date:
June 19, 2024
Filing Date:
September 04, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/14; B23Q17/20; B24B7/04; B24B55/00; B24B55/02; G01B5/02; H01L21/304
Domestic Patent References:
| JP201883266A | ||||
| JP201598074A | ||||
| JP11333719A | ||||
| JP63256358A |
Foreign References:
| US20130102227 |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office