研削装置 - Disco Co., Ltd.

Title:

研削装置

Document Type and Number:

Japanese Patent JP5481264

Kind Code:

B2

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Inventors:

Fumi Nakamura
Ken Mori Exhibition
Shinji Yoshida
Tomonori Higashikawa

Application Number:

JP2010094675A

Publication Date:

April 23, 2014

Filing Date:

April 16, 2010

Export Citation:

Assignee:

Disco Co., Ltd.

International Classes:

B24B49/04; B24B7/22; B24B49/10; B24B49/12; H01L21/304

Domestic Patent References:

Foreign References:

WO2005072910A1

Attorney, Agent or Firm:

Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi

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