Title:
GROOVING CONTROL DEVICE OF DICING APPARATUS
Document Type and Number:
Japanese Patent JP2501970
Kind Code:
B2
Abstract:
PURPOSE: To enhance the reliability of working accuracy and to rationalize work by correcting pitch feed quantity by calculating the shift quantity of the cut groove of a predetermined line and the reference line of a microscope on the basis of the image data obtained from an imaging means.
CONSTITUTION: When a pattern obtained after a cut groove is formed is subjected to comparative operation with respect to the pattern stored in an image memory 20 at the time of alignment by a comparative operation circuit 22, the image of a groove blade is largely changed with respect to the stored pattern. Only the changed image is taken out, and the center line is calculated through the averaging of the max. width and min. width by a shift quantity- calculating circuit 24 to calculate the shift quantity Δy of the center line and the reference line in an X-direction. Since the shift quantity Δy is no more than the shift of the aligned reference line and a blade position, the shift quantity Δy is fed back to a control circuit 26 as correction data.
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Inventors:
TANAKA TOMOYUKI
Application Number:
JP10793691A
Publication Date:
May 29, 1996
Filing Date:
May 14, 1991
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B28D5/00; B28D5/02; H01L21/301; H01L21/68; H01L21/78; (IPC1-7): B28D5/02; H01L21/301
Domestic Patent References:
| JPS63128907A | ||||
| JPS5853506A | ||||
| JPS5255871A | ||||
| JPS57114344A |
Attorney, Agent or Firm:
Kenzo Matsuura