PURPOSE: To accurately move a movable body straight even in the case that a guide face 5a as a reference is not flat face in the lengthwise direction between opposed guide faces 4a, 5a of a pair of upper and lower guide members 4, 5.
CONSTITUTION: Guide face adjusting mechanisms 9 are provided on a plurality of positions in the lengthwise direction between guide members 4, 5 of which guide faces 4a, 5a guide and support the slide faces 7d, 7e of a movable body 7 through static pressure bearings 8, 8. One guide member 4 is elastically deformed with the guide face adjusting mechanisms 9, the interval between the guide face 4a of the one guide member 4 and the guide face 5a of the other guide member 5 is made symmetrical on both sides of the center line of the interval in the lengthwise direction, and the movable body 7 is moved straight in the lengthwise direction of the interval while keeping the movable body 7 on the center of the interval with the static pressure bearings 8, 8.
SHIBUKAWA TETSUO
MURAKAMI SHINJI
