PURPOSE: To prevent the damage such as the crack at the time of take out and prevent the disarrangement of the laminated condition by falling down an absorption pad to the upper surface of substrates or the sheet material laminated in a housing cassette, and absorbing to raise the substrate or the sheet material of the most upper layer in a inclined state and while releasing it from other substrates or the sheet material.

CONSTITUTION: When a substrate or a sheet material 26a of the most upper layer is raised to the position of a positioning sensor 28, a rod 32 of an elevating machine 30 extends and an absorption pad 36 of the lower step of the inclination of two pairs of absorption pads abuts to the substrate or the sheet material 26a of the most upper layer. An electro magnetic valve 38a is opened, and the inlet negative load of a vacuum pump 40 acts upon the absorption pads 36, 36 and while holds up the substrate or the sheet material of the most upper layer. Next, an electromagnetic valve 38b is opened, and the air or the host blast compressed in a compressive pump 44 is injected from a blow nozzle 42 to the clearance between the substrate or the sheet material 26a of the most upper layer and the second layer, and only the material 26a of the most upper layer is absorbed to be taken out.