To alleviate the curvature of an X-beam due to thermal expansion in a head positioning device by cooling the X-beam with a use of a simple constitution.
An X-beam 11 supports a mounting head 2 movably in an X-direction. The X-beam 11 is provided with an intake/exhaust port pair 40A consisting of an upper intake/exhaust ports 41A and 41B, and a lower intake/exhaust ports 42A and 42B. The upper intake/exhaust ports 41A and 41B are formed such that they communicate respectively to the lower intake/exhaust ports 42A and 42B via a hollow part 17. When the X-beam 11 moves in a Y-direction orthogonal to the X-direction, a relative air flow is blown between the upper intake/exhaust ports 41A and 41B and the lower intake/exhaust ports 42A and 42B via a hollow part to thereby air-cool the X-beam.
FUKAMI NAOKI
SANO TATSUYA
NISHIHARA SHOJIRO
Samejima Mutsumi
Yoshiyuki Maebori
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