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Patent Searching and Data


Title:
HEAT INSULATING METHOD FOR QUARTS TUBE
Document Type and Number:
Japanese Patent JPH02301129
Kind Code:
A
Abstract:

PURPOSE: To easily pass the light from visible to near infrared range and to eliminate a disadvantage of insufficient heat insulating effect by using ceramics and fiber in combination as a heat insulator.

CONSTITUTION: Silicon carbide, silicon nitride, aluminum oxide, zirconium oxide, etc., for example, employed as ceramics of a heat insulator. Then, silica alumina, quartz, alumina, zirconia, etc., are employed, for example, as a fiber of another heat insulator. When quartz fiber out of them is employed, heat insulation is particularly satisfactory, and transfer of impurity to a quartz tube to be heat insulated is not substantially detected giving a particularly desirable result. As an actual heat insulating method for the tube, ceramics are provided on the part to be heat insulated such as a device of the surface of the tube such as a quartz reaction tube is exposed, and a fiber is provided thereon in a two- layer structure, or a multilayer structure of the repetition thereof is employed to mostly enhance the heat insulating effect satisfactorily.


Inventors:
IKUTA RYOZO
KAWAGUCHI MASANORI
Application Number:
JP12039989A
Publication Date:
December 13, 1990
Filing Date:
May 16, 1989
Export Citation:
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Assignee:
ASAHI GLASS CO LTD
International Classes:
H01L21/22; (IPC1-7): H01L21/22
Attorney, Agent or Firm:
Akira Uchida (2 outside)