Title:
Heat treating method
Document Type and Number:
Japanese Patent JP6058733
Kind Code:
B2
Inventors:
Kenichi Yokouchi
Application Number:
JP2015094091A
Publication Date:
January 11, 2017
Filing Date:
May 01, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/26; H01L21/265
Domestic Patent References:
| JP2008147533A | ||||
| JP2002252174A | ||||
| JP2005136218A | ||||
| JP2005167005A | ||||
| JP2007012675A | ||||
| JP2006351871A | ||||
| JP2006278532A |
Foreign References:
| US20080143268 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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