Title:
HEAT TREATMENT SYSTEM AND OPERATING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP3267766
Kind Code:
B2
Abstract:
PURPOSE: To provide a heat treatment system and an operating method therefor in which a counter flow of exhaust gas from a normal pressure exhaust system, for example, can be prevented during vacuum heat treatment and both vacuum heat treatment and normal pressure heat treatment can be effected.
CONSTITUTION: In the heat treatment system 1 where a chamber 3 for treating a material W is coupled with treating gas supply sections 14a-14c and an exhaust system, the exhaust system comprises a vacuum exhaust system 26 and a normal pressure exhaust system 27 wherein the normal pressure exhaust system 27 is provided with a pair of valves V5, V6 coupled through an evacuation means 37. When the vacuum exhaust system 26 is operated to start heat treatment, the pair of valves V5, V6 of the normal pressure exhaust system 27 are closed and the section between the valves V5, V6 is evacuated thus preventing counter flow of exhaust gas from the normal pressure exhaust system 27 during vacuum heat treatment. This constitution realizes a heat treatment system for effecting both vacuum heat treatment and normal pressure heat treatment.
Inventors:
Satoki Kobayashi
Application Number:
JP23585493A
Publication Date:
March 25, 2002
Filing Date:
August 30, 1993
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; C23C16/44; H01L21/22; H01L21/31; H01L21/324; (IPC1-7): H01L21/205; H01L21/22; H01L21/31
Domestic Patent References:
| JP3183693A | ||||
| JP4269822A | ||||
| JP45827A | ||||
| JP382016A | ||||
| JP1218013A | ||||
| JP3185715A | ||||
| JP32124U |
Attorney, Agent or Firm:
Noriyuki Kanesaka
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