Title:
HEATER
Document Type and Number:
Japanese Patent JPS5355532
Kind Code:
A
Inventors:
NAGASHIMA KANJI
Application Number:
JP13108276A
Publication Date:
May 20, 1978
Filing Date:
October 29, 1976
Export Citation:
Assignee:
NICHIDEN KIKAI KK
International Classes:
C30B13/24; H01L21/02; H01L21/208; H05B1/00; H05B3/00; (IPC1-7): B01J17/08; H01L21/02; H05B1/00
Domestic Patent References:
| JPS4936523A | 1974-04-04 | |||
| JPS5015437B1 | 1975-06-05 |