Title:
HEATING ELEMENT FOR METAL EVAPORATION
Document Type and Number:
Japanese Patent JP3926245
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a long-life heating element (boat) for metal evaporation used in evaporating metal in a vacuum.
SOLUTION: The heating element for metal evaporation has cavities on at least two surfaces of a prismatic body made of conductive ceramics.
Inventors:
Sugimoto Isao
Atsugi Igarashi
Shojiro Watanabe
Atsugi Igarashi
Shojiro Watanabe
Application Number:
JP2002288331A
Publication Date:
June 06, 2007
Filing Date:
October 01, 2002
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA
International Classes:
C04B35/58; C23C14/24; (IPC1-7): C23C14/24; C04B35/58
Domestic Patent References:
| JP2001240958A | ||||
| JP59029670B1 | ||||
| JP44031219Y1 |