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Title:
HEATING METHOD
Document Type and Number:
Japanese Patent JPH01300519
Kind Code:
A
Abstract:

PURPOSE: To perform uniform heating which is safe for a human body by a method wherein, when a body to be treated is provided and heated on a heating plate which is surrounded with a cover, an input/output port for the body to be treated is closed, and the inside of the cover is heated under a thermally exhausted state.

CONSTITUTION: A body to be treated is provided and heated on a heating plate 19 which is surrounded with a cover 28. At this time, an input/output port 29 for the body to be treated is closed. At the same time, the inside of the cover 28 is heated under a heat exhaust condition. Therefore, inflow of outer air into the cover through the input/output port 29 can be prevented. Hot air in the cover 28 does not flow to the outside through the input/output port 29 since a heat exhaust pipe 37 is positively provided. Thus, the safe heating method characterized by the uniform distribution of heating temperature can be obtained.


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Inventors:
MORIYAMA MASASHI
HIRAKAWA OSAMU
Application Number:
JP13072288A
Publication Date:
December 05, 1989
Filing Date:
May 27, 1988
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
TEL KYUSHU KK
International Classes:
G03F7/38; G03C5/00; G03F7/00; G03F7/26; H01L21/027; H01L21/30; (IPC1-7): G03C5/00; G03F7/00; H01L21/30
Domestic Patent References:
JPS6018919A1985-01-31
JPS6375032U1988-05-19
Attorney, Agent or Firm:
Hiroshi Takayama



 
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