Title:
高い流量及び高い均一性を有するユースポイント動的濃度送達システム
Document Type and Number:
Japanese Patent JP7445105
Kind Code:
B2
Abstract:
A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.
Inventors:
Ronald Nasman
Freedom, Lior
Devilliers, Anton
Robison, Rodney
Jacobson, Norman
Glute Good, James
Freedom, Lior
Devilliers, Anton
Robison, Rodney
Jacobson, Norman
Glute Good, James
Application Number:
JP2021563049A
Publication Date:
March 07, 2024
Filing Date:
March 24, 2020
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; B01F23/40; B01F33/301; B01F35/71; B01F35/83; B01J19/00; B05C5/00; B05C11/10; G03F7/30
Domestic Patent References:
| JP10321512A | ||||
| JP2018026137A | ||||
| JP5283332A | ||||
| JP10340839A | ||||
| JP2003210963A |
Foreign References:
| US20160250606 | ||||
| US6376013 | ||||
| WO2005049196A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito