Title:
HIGH-FREQUENCY POWER SUPPLY DEVICE
Document Type and Number:
Japanese Patent JP2015179581
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a high-frequency power supply device capable of reducing a loss produced in a switch in a DC/RF converter unit.SOLUTION: The high-frequency power supply device includes: a map storage unit 8C which, in order to reduce a loss produced in a high-side switch Q1 and a low-side switch Q2 in each leg of a switching circuit 5A of a DC/RF converter unit 5, stores a map which provides relationship among a proper value to be taken as a dead time in which the supply of a drive signal to both switches is stopped, a proper value to be taken as a peak value of a drive signal supplied to each switch, and load-side impedance when viewed from the switching circuit 5A to the load side; and a map calculation unit 8D which searches a map for the load-side impedance and calculates the proper value of the dead time and the proper value of the drive signal peak value. The dead time and the drive signal peak value to be supplied to each switch are equalized to the proper values calculated by the map calculation unit.
Inventors:
MATSUOKA TAKAHIRO
FUKANO KATSUYUKI
TANAKA FUMIO
FUKANO KATSUYUKI
TANAKA FUMIO
Application Number:
JP2014055790A
Publication Date:
October 08, 2015
Filing Date:
March 19, 2014
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
H05H1/46; H02M7/48
Domestic Patent References:
| JP2005204405A | 2005-07-28 | |||
| JP2001169558A | 2001-06-22 | |||
| JP2005204405A | 2005-07-28 | |||
| JP2001169558A | 2001-06-22 |
Foreign References:
| US9111718B2 | 2015-08-18 | |||
| US9111718B2 | 2015-08-18 |
Attorney, Agent or Firm:
Shinichi Kikuchi
Toru Kikuchi
Hidetoshi Matsumoto
Toru Kikuchi
Hidetoshi Matsumoto