Title:
HIGH-OUTPUT BEAM GENERATOR
Document Type and Number:
Japanese Patent JPH04229671
Kind Code:
A
Abstract:
PURPOSE: To realize a high output beam generator, especially for a UV or VUV beam with superior efficiency which can be manufactured at low cost, in which a large-scaled cubic beam generator can be constituted, a UV beam can be concentrated on an angle of radiation which can be selected in a wide limit as desired, and an inside electrode can no longer generate and project a shadow (shadow part). CONSTITUTION: In a UV high output beam generator, an outside electrode 4 is arranged at only one part of the surrounding of an outside dielectric tube 1, so that a generated beam can be directed to a certain prescribed direction, or that a shadow action by an inside dielectric tube 2 can be escaped. Thus, an object or material to be irradiated can be arranged directly in a discharging area 7.
Inventors:
URURITSUHI KOOGERUSHIYATSUTSU
Application Number:
JP11576291A
Publication Date:
August 19, 1992
Filing Date:
May 21, 1991
Export Citation:
Assignee:
ASEA BROWN BOVERI
International Classes:
H01J65/00; H01J65/04; H01S3/038; H01S3/225; (IPC1-7): H01J65/00; H01S3/038; H01S3/225
Domestic Patent References:
| JPH027353A | 1990-01-11 | |||
| JPS63314753A | 1988-12-22 | |||
| JP1155254B | ||||
| JP60096766B |
Attorney, Agent or Firm:
Toshio Yano (1 outside)