Title:
HIGH-SPEED VACUUM GATE VALVE
Document Type and Number:
Japanese Patent JPS58178066
Kind Code:
A
Inventors:
RICHIYAADO JIYON HAATERU
Application Number:
JP4803583A
Publication Date:
October 18, 1983
Filing Date:
March 24, 1983
Export Citation:
Assignee:
VARIAN ASSOCIATES
International Classes:
F16K3/18; F16K51/02; (IPC1-7): F16K3/16; F16K51/02
Attorney, Agent or Firm:
Sumio Takeuchi