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Title:
HIGH VOLTAGE SWITCH FOR LATERAL DISCHARGE EXCITATION GAS LASER
Document Type and Number:
Japanese Patent JPH0497578
Kind Code:
A
Abstract:

PURPOSE: To cause uniform lateral discharge of the electrode by uniformly transferring the stored charge in the charging capacitors distributed lengthwise along the electrode to the peaking capacitors in the longitudinal direction of the electrode as positioned.

CONSTITUTION: Electric charge from a high-voltage power source 11 is stored in a charging capacitor 4 through the reactors 13 and 14, a switch 12 is closed, and the electric charge is transferred to a peaking capacitor 15. When the capacitor 15 is fully charged, the stored energy is released to a laser discharge electrode 16. The capacitors 4 and 15 are positioned on a flat surface parallel to the longitudinal direction of the electrode and the high-voltage switch 12 is also placed on a flat surface in the longitudinal direction of the electrode by a FET 1. When a plurality of FET 1 are turned on simultaneously, the charge stored in capacitor 4 is transferred uniformly in the longitudinal direction of the electrode to the capacitor 15 by a multi-step connection including a feedback conduction board 3, the FET 1, and a conduction board 5. In this way, uniform charging in the longitudinal direction of the electrode is possible and electric charge is uniformly supplied in the longitudinal direction of the discharge electrode 16.


Inventors:
MINAMITANI YASUSHI
HARUTA TAKEO
SUZUKI AKIHIRO
Application Number:
JP21440290A
Publication Date:
March 30, 1992
Filing Date:
August 15, 1990
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L29/74; H01S3/097; (IPC1-7): H01L29/74; H01S3/097
Attorney, Agent or Firm:
Mitsuteru Soga (5 people outside)



 
Next Patent: JPS497579