To automate the work to arrange a work such as a thin film magnetic head at high precision by providing a work attaching/detaching head movable in the vertical direction on a base body controlled to be positioned in the horizontal direction by a horizontal moving means, and arranging a positioning table below the work attaching/detaching head.
When a starting command is given, a robot 1 is moved and a suction head 3 is stopped above a pallet 5a. Then, the suction head 3 is lowered, and then elevated after the work is sucked. After elevation is completed, the robot 1 is started to move, and a positioning table 4a is advanced at the same time. After advancement is completed, the suction head 3 is lowered, and after the work is temporarily placed on a suction port of the positioning table 4a, the suction head 3 is lowered to press and hold the work. When transfer and traveling of the robot 1 is completed, suction from the suction port is stopped, and as soon as suction from the suction head 3 is started, the suction head is slightly elevated to lift the work, and the work is stored in the prescribed cavity of a pallet 5b.
WO/2022/247336 | MATERIAL CONVEYING MECHANICAL ARM |
JPH08277898 | ROBOT DEVICE |
JP2664292 | [Title of Invention] Orthogonal 2-axis moving device |
KANEKIYO TOMOYUKI