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Title:
HOLDING DEVICE, EXPOSURE EQUIPMENT, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2013125790
Kind Code:
A
Abstract:

To provide a holding device advantageous in adjusting flatness of a pattern surface of an original plate.

The holding device for holding an original plate comprises: a plurality of chuck members which holds the original plate at an edge part of the original plate; and a plurality of support members, provided for the plurality of respective chuck members, which holds the plurality of chuck members, wherein each of support members is so constituted that its thickness is adjustable.


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Inventors:
DOI YUSUKE
Application Number:
JP2011272503A
Publication Date:
June 24, 2013
Filing Date:
December 13, 2011
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G03F7/20; H01L21/683
Domestic Patent References:
JPH02310912A1990-12-26
JP2001332480A2001-11-30
JP2003309053A2003-10-31
JP2011103407A2011-05-26
JPH09205131A1997-08-05
JP2010032942A2010-02-12
JP2001148335A2001-05-29
JP2009205023A2009-09-10
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa



 
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