Title:
HOT ELECTRON ANALYZER
Document Type and Number:
Japanese Patent JPH05251538
Kind Code:
A
Abstract:
PURPOSE: To detect instantaneous hot electron light emission for an arbitrary input signal.
CONSTITUTION: A hot electron analyzer has a system controller 7 for synchronously controlling a high frequency oscillator 4 and a high sensitivity television camera 2. Since it can analyze a hot electron light emission distribution of a moment or a state in which a desired input signal is applied to a semiconductor device to be analyzed, a malfunction generating position of all operating states of the semiconductor device can be easily specified.
Inventors:
FUJII MOYURU
Application Number:
JP4992A
Publication Date:
September 28, 1993
Filing Date:
January 06, 1992
Export Citation:
Assignee:
NEC CORP
International Classes:
H01L21/66; G01R31/302; (IPC1-7): H01L21/66; G01R31/302
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)