Title:
METHOD FOR CLEANING EXTREME-ULTRAVIOLET LIGHT REFLECTION MIRROR
Document Type and Number:
Japanese Patent JP2022165623
Kind Code:
A
Abstract:
To provide a method for cleaning extreme-ultraviolet light reflection mirror that can shorten the cleaning period and reduce the cleaning cost.SOLUTION: A cleaning method includes a contact step SP21 of contacting α-tin with solid tin debris adhering to an extreme-ultraviolet light reflection mirror, and an aging step SP22 that promotes tin-pestation of tin debris by leaving tin debris in contact with α-tin in a sub-zero ambient temperature environment. Also, the cleaning method further includes a removal step SP23 of removing the tin-pested tin debris from the extreme-ultraviolet light reflection mirror.SELECTED DRAWING: Figure 9
Inventors:
NIIMI KOTA
Application Number:
JP2021071040A
Publication Date:
November 01, 2022
Filing Date:
April 20, 2021
Export Citation:
Assignee:
GIGAPHOTON INC
International Classes:
G03F7/20; G02B5/08; G03F1/84
Attorney, Agent or Firm:
Yasuo Morimura
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