Title:
エミッタ構造の作製方法とその結果のエミッタ構造
Document Type and Number:
Japanese Patent JP5374504
Kind Code:
B2
Abstract:
A method for forming an emitter structure on a substrate and emitter structures resulting therefrom is disclosed. In one aspect, a method includes forming, on the substrate, a first layer comprising semiconductor material. The method also includes texturing a surface of the first layer, thereby forming a first emitter region from the first layer, wherein the first emitter region has a first textured surface. The method also includes forming a second emitter region at the first textured surface, the second emitter region having a second textured surface.
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Inventors:
Chris van Niwen Heisen
Philip Duelinks
Philip Duelinks
Application Number:
JP2010516519A
Publication Date:
December 25, 2013
Filing Date:
July 18, 2008
Export Citation:
Assignee:
IMEC
International Classes:
H01L31/04; H01L21/3065
Domestic Patent References:
JP55082472A | ||||
JP6163954A | ||||
JP4245683A | ||||
JP5095124A | ||||
JP2007142471A | ||||
JP2004327578A | ||||
JP2006222272A | ||||
JP2007235174A | ||||
JP64073681A | ||||
JP2006310368A | ||||
JP63058974A | ||||
JP62035680A | ||||
JP2000332282A | ||||
JP10303442A | ||||
JP6045622A |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Mikio Takeuchi
Haruo Nakano
Mitsuo Tanaka
Mikio Takeuchi
Haruo Nakano
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