Title:
微細パターンの作製方法
Document Type and Number:
Japanese Patent JP4811543
Kind Code:
B2
Inventors:
Tetsuya Osaka
Tokihiko Yokoshima
Sanae Shimizu
Atsushi Tanaka
Tokihiko Yokoshima
Sanae Shimizu
Atsushi Tanaka
Application Number:
JP2000272664A
Publication Date:
November 09, 2011
Filing Date:
September 08, 2000
Export Citation:
Assignee:
学校法人早稲田大学
富士通株式会社
富士通株式会社
International Classes:
C23C18/31; C23C18/50; G11B5/31; H01F10/16; H01F41/24
Domestic Patent References:
| JP4196402A | ||||
| JP8232073A | ||||
| JP55102297A | ||||
| JP6010146A | ||||
| JP5065661A | ||||
| JP4225826A | ||||
| JP63119512A | ||||
| JP8311656A | ||||
| JP58202595A |
Attorney, Agent or Firm:
Takashi Kojima
Yuko Nishikawa
Yoshihiro Nagare
Yuko Nishikawa
Yoshihiro Nagare