Title:
導波路とプラズモンジェネレータを備えた近接場光発生器の製造方法
Document Type and Number:
Japanese Patent JP5816672
Kind Code:
B2
Abstract:
In a method of manufacturing a near-field light generator, a structure including a core and a polishing stopper layer disposed on the top surface of the core is formed on a first cladding layer. Next, a cladding material layer is formed to cover the first cladding layer and the structure. The cladding material layer is then polished until the polishing stopper layer is exposed. Next, the polishing stopper layer is removed so that the cladding material layer has a protruding portion protruding upward to a higher level than the top surface of the core. The cladding material layer is then polished so as to remove the protruding portion and thereby make the cladding material layer into a second cladding layer. Then, a third cladding layer and a plasmon generator are formed.
Inventors:
Hironori Araki
Yoshitaka Sasaki
Hiroyuki Ito
Seiichiro Tomita
Shigeki Tanemura
Kazumasa Yasuda
Yoshitaka Sasaki
Hiroyuki Ito
Seiichiro Tomita
Shigeki Tanemura
Kazumasa Yasuda
Application Number:
JP2013223048A
Publication Date:
November 18, 2015
Filing Date:
October 28, 2013
Export Citation:
Assignee:
Headway Technologies, Inc.
International Classes:
G11B5/31; G11B5/02
Domestic Patent References:
| JP2012003830A | ||||
| JP2010061715A | ||||
| JP2007287313A | ||||
| JP2007257711A | ||||
| JP2004165434A |
Attorney, Agent or Firm:
Katsumi Hoshimiya
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