Title:
サブストレート付きウエーハの加工方法
Document Type and Number:
Japanese Patent JP5349982
Kind Code:
B2
Inventors:
Yusuke Otake
Akiharu Tai
Akiharu Tai
Application Number:
JP2009006047A
Publication Date:
November 20, 2013
Filing Date:
January 14, 2009
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/304; B24B9/00; B24B49/04; B24B49/12; B28D5/02
Domestic Patent References:
| JP2005116614A | ||||
| JP2007305835A |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito