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Patent Searching and Data


Title:
【発明の名称】フレ―ムの搬送切換機構並びにその切換方法
Document Type and Number:
Japanese Patent JP2538800
Kind Code:
B2
Inventors:
URAMOTO IWAMI
MYOSHI HIDEAKI
NOMURA HISASHI
Application Number:
JP29400089A
Publication Date:
October 02, 1996
Filing Date:
November 14, 1989
Export Citation:
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Assignee:
KAIJO KK
International Classes:
H01L21/52; H01L21/50; (IPC1-7): H01L21/50; H01L21/52
Attorney, Agent or Firm:
Shoji Hagiri