Title:
【発明の名称】プラズマ放射光の照射方法および装置
Document Type and Number:
Japanese Patent JP2854235
Kind Code:
B2
Inventors:
KAKUDATE YOZO
YOSHIDA MASANORI
FUJIWARA SHUZO
USUHA SHU
YOKOI HIROYUKI
TAKAO NOBUYUKI
SUGYAMA SHUICHI
YOSHIDA MASANORI
FUJIWARA SHUZO
USUHA SHU
YOKOI HIROYUKI
TAKAO NOBUYUKI
SUGYAMA SHUICHI
Application Number:
JP33400993A
Publication Date:
February 03, 1999
Filing Date:
December 28, 1993
Export Citation:
Assignee:
KOGYO GIJUTSU INCHO
FUJI DENKI SOGO KENKYUSHO KK
FUJI DENKI SOGO KENKYUSHO KK
International Classes:
G21K5/02; H01J35/22; H01L21/205; H05H1/24; (IPC1-7): G21K5/02; H01J35/22; H01L21/205; H05H1/24
Attorney, Agent or Firm:
Iwao Yamaguchi (1 person outside)
Shoji Shinobe
Shoji Shinobe