PURPOSE: To contrive the reduction of its workhours and the improvement of inspection precision when a heating part of a handler, namely, the temperature distribution precision of an IC measuring part is inspected periodically.

CONSTITUTION: A part from a feed part 4 and a housing part 14 of a normal IC to be measured 10a, another feed part 5 and another housing part 15 for a temperature sensor package 11a wherein a temerature measurement element has been packaged in the form of its IC, a mixture feed part 6 for selectively feeding IC to be measured 10a or the temperature sensor package 11a from these feed parts 4, 5 to a measuring device 8 by an instruction from a handler control part and a fractional mechanism part 12 for sending both ICs to be measured discharged from the measuring device 8 to the housing parts 14, 15 respectively are equipped, so that they are pushed in a normal test and the inspection of temperature distribution precision of a heating part is made possible automatically.